MOSFET Fabrication for IC Video Lecture, IIT Madras

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VLSI Technology

Lecture 3: MOSFET Fabrication for IC

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Course Description :

Introduction, BJT and MOSFET Fabrication, Crystal Structure of Si, Epitaxy, Molecular beam Epitaxy, Oxidation, Diffusion, Ion - Implantation Process, Lithography, Wet Chemical Etching, Dry Etching, Plasma Deposition Process, CMOS Technology and BICMOS Technology.

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