Control of Manufacturing Processes

Overview

Introduction Processes and Variation Framework - Semiconductor Process Variation - Mechanical Process Variation - Probability Models of Manufacturing Processes - Probability Models, Parameter Estimation, and Sampling - Sampling Distributions and Statistical Hypotheses - Shewhart SPC and Process Capability - Process Capability and Alternative SPC Methods - Advanced and Multivariate SPC - Yield Modeling - Introduction to Analysis of Variance - Full Factorial Models - Modeling Testing and Fractional Factorial Models - Aliasing and Higher Order Models - Response Surface Modeling and Process Optimization - Process Robustness - Nested Variance Components - Sequential Experimentation - Case Study 1: Tungsten CVD DOE/RSM - Case Study 2: Cycle to Cycle Control - Case Study 3: Spatial Modeling - Case Study 4: Modeling the Embossing/Imprinting of Thermoplastic Layers.