Introduction to MEMS Design,Fall 2011

UC Berkeley Course , Fall 2011 , Prof. Clark Tu-Cuong Nguyen

Lecture 1: Introduction

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Lecture Details :

Introduction to MEMS Design

Course Description :

Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS

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