SignUpVLSI Technology I
IIT Kharagpur, , Prof. S.Kal
Updated On 02 Feb, 19
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IIT Kharagpur, , Prof. S.Kal
Updated On 02 Feb, 19
Contents:
Introduction to VLSI - Design and Technology Overview of VLSI - Yield and cost Estimation of VLSI Chips - Defects, Contamination & Clean Room Requirements - Wafer Cleaning Technology - Oxidation of Silicon - Reaction Kinetics of Oxide Growth in Silicon - Oxidation Techniques, Growth Rate & Characterization - Lithography Process - Photoresists - Optical Lithography Techniques - Exposure Tools and Optical Effects in Lithography - Advanced Lithography Techniques (X-ray,Ion-Beam,E-Beam) - Etching - Dry & Plasma Etching - Impurity Diffusion in Semiconductors
Diffusion Theory and Diffusion Systems - Impurities in Silicon and Diffusion Profile - Evaluation of Diffused Layers in Semiconductors -Ion Implantation : Range Theory and Stopping Mechanism - Ion Implantation Theory and Channeling - Ion Implant Machine - High Energy High Dose Implantation - Epitaxy Techniques and Classifications - Vapor Phase and Liquid Phase Epitaxy - VPE Growth Kinetics and MBE - Defects in Epitaxy Growth, Selective Epitaxy - Chemical Vapor Deposition (CVD): APCVD, LPCVD - CVD Techniques: PECVD, RTCVD, UHVCVD - Metal CVD and MOCVD
Materials for Contacts and Interconnects in VLSI - Metallization Techniques - I : Physical Evaporation - Metallization Techniques - II : Sputtering - Metallization Problems and Failure Mechanisms - Silicides and Copper Metallization - Isolation Technology in VLsI - Advanced Isolation Technology in VLSI - Bipolar VLSI Process Technology - MOS VLSI Process Technology - Advanced VLSI MOS/CMOS Process - CMOS/BiCMOS Process Technology - VLSI Assembly & Packaging : Chip and Wire Bonding - VLSI Packaging Technology
4.1 ( 11 )
Video lecture series from IIT Professors (Not Available in NPTEL)
VLSI Technology by Prof.Santiram Kal, IIT KGP
for more video lectures .... www.satishkashyap.com
for free ebooks ..... www.ebook29.blogspot.com
1. Introduction to VLSI
2. Design and Technology Overview of VLSI - I
3. Design and Technology Overview of VLSI - II
4. Yield and cost Estimation of VLSI Chips
5. Defects, Contamination & Clean Room Requirements
6. Wafer Cleaning Technology
7. Oxidation of Silicon
8. Reaction Kinetics of Oxide Growth in Silicon
9. Oxidation Techniques, Growth Rate & Characterization
10. Lithography Process
11. Photoresists
12. Optical Lithography Techniques
13. Exposure Tools and Optical Effects in Lithography
14. Advanced Lithography Techniques (X-ray,Ion-Beam,E-Beam)
15. Etching
16.
17. Dry & Plasma Etching
18.
19. Impurity Diffusion in Semiconductors
20. Diffusion Theory and Diffusion Systems
21. Impurities in Silicon and Diffusion Profile
22. Evaluation of Diffused Layers in Semiconductors
23. Ion Implantation Range Theory and Stopping Mechanism
24. Ion Implantation Theory and Channeling
25. Ion Implant Machine
26. High Energy High Dose Implantation
27. Epitaxy Techniques and Classifications
28. Vapor Phase and Liquid Phase Epitaxy
29. VPE Growth Kinetics and MBE
30. Defects in Epitaxy Growth, Selective Epitaxy
31. Chemical Vapor Deposition (CVD) APCVD, LPCVD
32. CVD Techniques PECVD, RTCVD, UHVCVD
33. Metal CVD and MOCVD
34. Materials for Contacts and Interconnects in VLSI
35. Metallization Techniques - I Physical Evaporation
36. Metallization Techniques - II Sputtering
37. Metallization Problems and Failure Mechanisms
38. Silicides and Copper Metallization
39. Isolation Technology in VLsI
40. Advanced Isolation Technology in VLSI
41. Bipolar VLSI Process Technology
42.
43. MOS VLSI Process Technology
44. Advanced VLSI MOSCMOS Process
45. CMOSBiCMOS Process Technology
46. VLSI Assembly & Packaging Chip and Wire Bonding
47. VLSI Packaging Technology
Sam
Sep 12, 2018
Excellent course helped me understand topic that i couldn't while attendinfg my college.
Dembe
March 29, 2019
Great course. Thank you very much.
