Microfabrication Technology

UC Berkeley Course , Fall 2014 , Prof. Clark Tu-cuong Nguyen

Lecture 1: Process Integration

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Lecture Details :

Electrical Engineering 143, 001 - Fall 2014
Microfabrication Technology - Clark Tu-cuong Nguyen
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Course Description :

Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated

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