Introduction to MEMS Design

UC Berkeley | Electronics | 2670 views    

Topics Covered:
Introduction, Basic IC/MEMS Fabrication, Deposition, Etching, Surface & Bulk Micromachining, Beams, Gaps, Resonators; better approximations: Parallel Plates, Couette Damping, Squeeze Film Damping, Effective Mass, Electrostatic, Electrostatic Pull-in, Thermal Conductivity , Thermal Capacity, Thermal Time Constant; Foundry Process;


Lecture 1




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Current Comments


By  nazif on November 2nd, 2009 11:13am


good jub for academicpeople

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