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Lecture Details
Lecture 1:Introduction: What is MEMS?
Lecture 2:Basic IC/MEMS Fabrication
Lecture 3:Deposition, Etching
Lecture 4:Surface & Bulk Micromachining
Lecture 5:More Bulk & Surface Micromachining
Lecture 6:More Bulk & Surface Micromachining
Lecture 7:Beams
Lecture 8:Gaps
Lecture 9 : lecture 9
Lecture 10 : lecture 10
Lecture 11 : Guest Lecture: Matt Last
Lecture 12 : Resonators
Lecture 13 : Better Approximations: Parallel Plates, Couette Damping, Squeeze Film Damping, Effective Mass, Electrostatic
Lecture 14 :Electrostatic Pull-in; Thermal Conductivity, Thermal Capacity, Thermal Time Constant
Lecture 15 : Foundry Processes
Other Lecture Details Not available.