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MEMS and Microsystems

IIT Kharagpur, , Prof. Santiram Kal

Updated On 02 Feb, 19

Overview

Introduction, Evoluation of MEMS, Microsensors. MEMS Materials, Microelectronic Technology, Etch Stop Techniques, Fabrication of Micromachined Microstructure, Microstereolithography, MEMS Pressure and Flow Sensor, MEMS Gyro Sensor, MEMS for Space Application, Wafer Bonding, Packaging of MEMS, MEMS for Biomedical Applications (Bio-MEMS).

Includes

Lecture 16: MEMS Microsensors Thermal

4.1 ( 11 )


Lecture Details

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Comments
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Sam

Sep 12, 2018

Excellent course helped me understand topic that i couldn't while attendinfg my college.

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Dembe

March 29, 2019

Great course. Thank you very much.

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