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MEMS and Microsystems

IIT Kharagpur, , Prof. Santiram Kal

Overview

Introduction, Evoluation of MEMS, Microsensors. MEMS Materials, Microelectronic Technology, Etch Stop Techniques, Fabrication of Micromachined Microstructure, Microstereolithography, MEMS Pressure and Flow Sensor, MEMS Gyro Sensor, MEMS for Space Application, Wafer Bonding, Packaging of MEMS, MEMS for Biomedical Applications (Bio-MEMS).

Includes

Lecture 21: Micromachined Microaccelerometers

4.1 ( 11 )


Lecture Details

Ratings

5.0


1 Ratings
55%
30%
10%
3%
2%
Comments
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Sam

Excellent course helped me understand topic that i couldn't while attendinfg my college.

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Dembe

Great course. Thank you very much.

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