Soft X-Rays and Extreme Ultraviolet Radiation
UC Berkeley, , Prof. David Attwood
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Updated On 02 Feb, 19
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Applied Science & Technology 210 Electrical Engineering 213 Soft X-Rays and Extreme Ultraviolet Radiation
Lecture 28 EUV lithography
Professor David T. Attwood, Electrical Engineering Professor in Residence, Professor Attwoods research interests include short wavelength electromagnetics, soft x-ray microscopy, coherence, and EUV lithography.
[courses] [ee213] [fall2005]
Sep 12, 2018
Excellent course helped me understand topic that i couldn't while attendinfg my college.
March 29, 2019
Great course. Thank you very much.