Introduction to MEMS Design,Fall 2011
UC Berkeley,, Fall 2011 , Prof. Clark Tu-Cuong Nguyen
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Updated On 02 Feb, 19
Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS
4.1 ( 11 )
Introduction to MEMS Design
Sep 12, 2018
Excellent course helped me understand topic that i couldn't while attendinfg my college.
March 29, 2019
Great course. Thank you very much.