Micro and Smart Systems
IISc Bangalore, , Prof. K.N. Bhat
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Updated On 02 Feb, 19
Introduction : Glimpses of Microsystems; scaling effects - Smart materials and systems: an overview - Microsensors: some examples - Microactuators: some examples - Microsystems: some examples - Examples of smart systems: structural health monitoring and vibration control
Microfabrication processes : Structure of silicon and other materials - Silicon wafer processing; Thin-film deposition - Lithography, wet etching and dry etching - Bulk micromachining and Surface micromachining - Wafer-bonding; LIGA and other moulding techniques - Soft lithography and polymer processing - Thick-film processing; Low temperature co-fired ceramic processing - Smart material processing
Mechanics of Solids : Stresses and deformation: bars and beams - Microdevice suspensions: lumped modeling - Residual stress and stress gradients - Poisson effect; Anticlastic curvature; examples of micromechanical structures - Thermal loading; bimorph effect - Dealing with large displacements; in-plane and 3D elasticity equations - Vibrations of bars and beams - Gyroscopic effect - Frequency response; damping; quality factor - Basic micro-flows for damping calculation
Finite element method : Types of numerical methods for solving partial differential equations - What is finite element method? Variational principles - Weak form; shape functions - Isoparametric formulation and numerical integration - Implementation of the finite element method - FEM for piezoelectrics
Electronics and packaging : Semiconductor devices: basics - OpAms and OpAmp circuits - Signal conditioning for microsystems devices - Control and microsystems - Vibration control of a beam - Integration of microsystems and microelectronics - Packaging of Microsystems: why and how - Flip-chip, ballgrid, etc.; reliability - Case-study 1 (Pressure sensor) - Case-study 2 (Accelerometer)
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Micro and Smart Systems by Prof. K.N. Bhat,Prof. G.K. Anathasuresh,Prof. S. Gopalakrishnan,Dr. K.J. Vinoy, Department of Mechanical Engineering, IISc Bangalore. For more details on NPTEL visit httpnptel.ac.in
Sep 12, 2018
Excellent course helped me understand topic that i couldn't while attendinfg my college.
March 29, 2019
Great course. Thank you very much.