x
Menu

VLSI Technology I

IIT Kharagpur, , Prof. S.Kal

Updated On 02 Feb, 19

Overview

Contents:
Introduction to VLSI - Design and Technology Overview of VLSI - Yield and cost Estimation of VLSI Chips - Defects, Contamination & Clean Room Requirements - Wafer Cleaning Technology - Oxidation of Silicon - Reaction Kinetics of Oxide Growth in Silicon - Oxidation Techniques, Growth Rate & Characterization - Lithography Process - Photoresists - Optical Lithography Techniques - Exposure Tools and Optical Effects in Lithography - Advanced Lithography Techniques (X-ray,Ion-Beam,E-Beam) - Etching - Dry & Plasma Etching - Impurity Diffusion in Semiconductors

Diffusion Theory and Diffusion Systems - Impurities in Silicon and Diffusion Profile - Evaluation of Diffused Layers in Semiconductors -Ion Implantation : Range Theory and Stopping Mechanism - Ion Implantation Theory and Channeling - Ion Implant Machine - High Energy High Dose Implantation - Epitaxy Techniques and Classifications - Vapor Phase and Liquid Phase Epitaxy - VPE Growth Kinetics and MBE - Defects in Epitaxy Growth, Selective Epitaxy - Chemical Vapor Deposition (CVD): APCVD, LPCVD - CVD Techniques: PECVD, RTCVD, UHVCVD - Metal CVD and MOCVD

Materials for Contacts and Interconnects in VLSI - Metallization Techniques - I : Physical Evaporation - Metallization Techniques - II : Sputtering - Metallization Problems and Failure Mechanisms - Silicides and Copper Metallization - Isolation Technology in VLsI - Advanced Isolation Technology in VLSI - Bipolar VLSI Process Technology - MOS VLSI Process Technology - Advanced VLSI MOS/CMOS Process - CMOS/BiCMOS Process Technology - VLSI Assembly & Packaging : Chip and Wire Bonding - VLSI Packaging Technology

Includes

Lecture 26: Skal 28 - Vapor Phase and Liquid Phase Epitaxy

4.1 ( 11 )


Lecture Details

Video lecture series from IIT Professors (Not Available in NPTEL)
VLSI Technology by Prof.Santiram Kal, IIT KGP

for more video lectures .... www.satishkashyap.com

for free ebooks ..... www.ebook29.blogspot.com



1. Introduction to VLSI

2. Design and Technology Overview of VLSI - I

3. Design and Technology Overview of VLSI - II

4. Yield and cost Estimation of VLSI Chips

5. Defects, Contamination & Clean Room Requirements

6. Wafer Cleaning Technology

7. Oxidation of Silicon

8. Reaction Kinetics of Oxide Growth in Silicon

9. Oxidation Techniques, Growth Rate & Characterization

10. Lithography Process

11. Photoresists

12. Optical Lithography Techniques

13. Exposure Tools and Optical Effects in Lithography

14. Advanced Lithography Techniques (X-ray,Ion-Beam,E-Beam)

15. Etching

16.

17. Dry & Plasma Etching

18.

19. Impurity Diffusion in Semiconductors

20. Diffusion Theory and Diffusion Systems

21. Impurities in Silicon and Diffusion Profile

22. Evaluation of Diffused Layers in Semiconductors

23. Ion Implantation Range Theory and Stopping Mechanism

24. Ion Implantation Theory and Channeling

25. Ion Implant Machine

26. High Energy High Dose Implantation

27. Epitaxy Techniques and Classifications

28. Vapor Phase and Liquid Phase Epitaxy

29. VPE Growth Kinetics and MBE

30. Defects in Epitaxy Growth, Selective Epitaxy

31. Chemical Vapor Deposition (CVD) APCVD, LPCVD

32. CVD Techniques PECVD, RTCVD, UHVCVD

33. Metal CVD and MOCVD

34. Materials for Contacts and Interconnects in VLSI

35. Metallization Techniques - I Physical Evaporation

36. Metallization Techniques - II Sputtering

37. Metallization Problems and Failure Mechanisms

38. Silicides and Copper Metallization

39. Isolation Technology in VLsI

40. Advanced Isolation Technology in VLSI

41. Bipolar VLSI Process Technology

42.

43. MOS VLSI Process Technology

44. Advanced VLSI MOSCMOS Process

45. CMOSBiCMOS Process Technology

46. VLSI Assembly & Packaging Chip and Wire Bonding

47. VLSI Packaging Technology

Ratings

0


0 Ratings
55%
30%
10%
3%
2%
Comments
comment person image

Sam

Excellent course helped me understand topic that i couldn't while attendinfg my college.

Reply
comment person image

Dembe

Great course. Thank you very much.

Reply
Send