Advanced manufacturing process for micro sytem
IIT Kanpur, , Prof. Shantanu Bhattacharya
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Updated On 02 Feb, 19
Historical Perspective - Emerging of MEMS - Emergence of BioMEMS - Micro/ Nano-systems - On Size and Scale! - Silicon MEMS examples - Examples of Microsystems in Biology - Bio-Micro/ Nano-systems and technology - Introduction to Advanced Manufacturing processes - History of Machining - Machining Accuracies - Classification of all Material Removal Processes - Machining By Cutting (Conventional) - Various Metal Cutting Processes - Abrasive Machining Categories - Non Traditional Machining - Classification of Non Traditional Machining - Mechanical Machining - Thermal Machining - Chemical and Electrochemical Machining - Summary Description of the course - MEMS materials - Crystallography and crystal structure - Single Crystalline silicon formulation (Czochralski's growth method) - Czochralsky's Growth Method - Single Crystalline silicon formulation (Float zone method) - Glass - Wafer specification and preparation - Introduction to Device fabrication - Introduction to Micro-fabrication - Subtractive Techniques
Subtractive Techniques - Etch Selectivity - Some Common Etchants (for Isotropic Wet Etching in Silicon) - Dry Etching - Recipes of Dry Etchant Gases - Photolithography - Types of photolithography - The resolution at the bottom of the Photoresist Types for Optical lithography (+ve and -ve tone) - Polymer MEMS - Materials for MEMS specially Polymer MEMS - Some Fabrication Methods for soft materials - Replication and Molding - Micro contact printing - PDMS glass silicon hybrid biochip - Micro-channel Arrays using Controlled Etching - Capillary moulding (Used for micropatterning) - Dip Pen Lithography - Compression Molding - Nano imprint lithography - Process Steps for Photolithography - Process Steps For Lithography - Spray Development,-ve tone photoresist SU8 - How does it work? - Variation of roughness of exposed SU8 features with exposure time - Etching (Bulk micromachining) - Deposition and Liftoff - Wafer level bonding schemes - Results: Fabrication Methodology Developed - Bond Strength Measurement - Effect on PDMS surface of Plasma exposure - Surface cracking and oozing out of Oligomeric chains
Introduction to Abrasive Jet Machining (AJM) - Mechanics of AJM - Process parameters - The Abrasive - The gas - Nozzle to tip distance (Stand off distance) - Photo graphs of the actual Machined Cavity profile at different NTD - Mixing and Mass Ratio - Numerical Problem - Abrasive Jet Machines - Ultrasonic Machining - Basics of the USM process - Mechanics of USM - M.C. Shaw's model of USM mechanics - USM process - Plot between MRR and Feed force - Process Parameters - Dependence of surface finish on grain size - Numerical Problem - Ultrasonic Machining Unit - Acoustic Head - Feed Mechanism - Design consideration for the Tool - Abrasive Slurry - Abrasive Jet Micro Machining (AJMM) - Erosive Mechanism of AJMM - Mask Materials of AJMM - Micromachining with Abrasive Water Jets - Micro-grooving of glass using micro-abrasive jet machining - Micro Fluidic Channel Machining on Fused Silica Glass Using Powder Blasting - AJMM of micro-channels in PMMA - Electrochemical Machining (ECM) - Electrochemistry of ECM process - Ion-Ion and ion-solvent interaction
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Advanced manufacturing process for micro sytem fabrication by Dr. Shantanu Bhattacharya,Department of Mechanical Engineering,IIT Kanpur.For more details on NPTEL visit httpnptel.ac.in
Sep 12, 2018
Excellent course helped me understand topic that i couldn't while attendinfg my college.
March 29, 2019
Great course. Thank you very much.