Fabrication of Silicon VLSI Circuits using the MOS technology

Introduction Micro to Nano A Journey into Intergrated Circuit Technology – Crystal Properties and Silico Growth – IC Fab Labs and Fabrication of IC – Diffusion – Solid State Diffusion – Thermal Oxidation of Silicons – Lithography – ION Implantation – ION Implantation & Silicon IC Processing Flow for CMOS Technology – Silicon IC Processing Flow for CMOS Technology – Thin Film Deposition & Etching in VLSI Processing – Etching in VLSI Processing & Back – End Technology