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Fabrication of Silicon VLSI Circuits using the MOS technology

IIT Bombay, , Prof. A.N. Chandorkar

Updated On 02 Feb, 19

Overview

Introduction Micro to Nano A Journey into Intergrated Circuit Technology - Crystal Properties and Silico Growth - IC Fab Labs and Fabrication of IC - Diffusion - Solid State Diffusion - Thermal Oxidation of Silicons - Lithography - ION Implantation - ION Implantation & Silicon IC Processing Flow for CMOS Technology - Silicon IC Processing Flow for CMOS Technology - Thin Film Deposition & Etching in VLSI Processing - Etching in VLSI Processing & Back - End Technology

Includes

Lecture 20: ION Implantation

4.1 ( 11 )


Lecture Details

Fabrication of Silicon VLSI Circuits using the MOS technology by Prof. A.N. Chandorkar, Department of Electrical Engineering, IIT Bombay. For more details on NPTEL visit httpnptel.ac.in

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Sam

Excellent course helped me understand topic that i couldn't while attendinfg my college.

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Dembe

Great course. Thank you very much.

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