Fabrication of Silicon VLSI Circuits using the MOS technology

IIT Bombay , Prof.A.N. Chandorkar

Thin Film Deposition & Etching in VLSI Processing

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Lecture Description

Fabrication of Silicon VLSI Circuits using the MOS technology by Prof. A.N. Chandorkar, Department of Electrical Engineering, IIT Bombay. For more details on NPTEL visit http://nptel.ac.in

Course Description

Introduction Micro to Nano A Journey into Intergrated Circuit Technology – Crystal Properties and Silico Growth – IC Fab Labs and Fabrication of IC – Diffusion – Solid State Diffusion – Thermal Oxidation of Silicons – Lithography – ION Implantation – ION Implantation & Silicon IC Processing Flow for CMOS Technology – Silicon IC Processing Flow for CMOS Technology – Thin Film Deposition & Etching in VLSI Processing – Etching in VLSI Processing & Back – End Technology

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