Course Details
COURSE LAYOUT
Week 1: Basics of Energy Transformation: Transducers, Sensors and Actuators Week 2: Understanding of thin film physics: Application in MOSFET and its variants Week 3: Thin Film Deposition Techniques: Chemical Vapor Deposition (APCVD, LPCVD, UHVCVD, PECVD, ALCVD, HPCVD, MOCVD) Week 4: Thin Film Deposition Techniques: Physical Vapor Deposition (Thermal Deposition, E-beam Evaporation, Sputtering, Pulsed Laser Deposition) Week 5: Basics understanding of Photolithography for pattering layer. Detailed overview of Etching methods. Week 6: Understanding various gas sensors: Optical gas sensor, Metal oxide semiconductor gas sensor, Field effect transistor gas sensor, Piezoelectric gas sensor, Polymer gas sensor, Nano-structured based gas sensors Week 7: Design and fabrication process of Microsensors: Force Sensors, Pressure Sensors, Strain gauges and practical applications Week 8: Explain working principles of Actuators. Piezoelectric and Piezoresistive actuators, micropumps and micro actuators with practical applications Week 9: Understanding basics of microfluidics to assist Photomask design using Clewin Software, pattern transfer techniques, PDMS moulding and degassing, device bonding techniques. Week 10: Simulation, Optimization and characterization of various sensors using COMSOL Multiphysics Week 11: Understanding of Sensor Interfacing with Microprocessor to build electronic system Week 12: Static and Dynamic Characteristic Parameters for Sensors and Actuators, Calibration of Sensor based electronics systems.