Introduction — Processes and Variation Framework – Semiconductor Process Variation – Mechanical Process Variation – Probability Models of Manufacturing Processes – Probability Models, Parameter Estimation, and Sampling – Sampling Distributions and Statistical Hypotheses – Shewhart SPC and Process Capability – Process Capability and Alternative SPC Methods – Advanced and Multivariate SPC – Yield Modeling – Introduction to Analysis of Variance – Full Factorial Models – Modeling Testing and Fractional Factorial Models – Aliasing and Higher Order Models – Response Surface Modeling and Process Optimization – Process Robustness – Nested Variance Components – Sequential Experimentation – Case Study 1: Tungsten CVD DOE/RSM – Case Study 2: Cycle to Cycle Control – Case Study 3: Spatial Modeling – Case Study 4: Modeling the Embossing/Imprinting of Thermoplastic Layers.

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