Microfabrication Technology

UC Berkeley Course , Fall 2014 , Prof. Clark Tu-cuong Nguyen

163 students enrolled

Overview

Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated

Lecture 1: Process Integration

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        Lecture Details

        Electrical Engineering 143, 001 - Fall 2014 Microfabrication Technology - Clark Tu-cuong Nguyen All Rights Reserved

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