UC Berkeley,, Fall 2014 , Prof. Clark Tu-cuong Nguyen
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Updated On 02 Feb, 19
Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated
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Electrical Engineering 143, 001 - Fall 2014
Microfabrication Technology - Clark Tu-cuong Nguyen
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Sep 12, 2018
Excellent course helped me understand topic that i couldn't while attendinfg my college.
March 29, 2019
Great course. Thank you very much.