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Microfabrication Technology

UC Berkeley,, Fall 2014 , Prof. Clark Tu-cuong Nguyen

Updated On 02 Feb, 19

Overview

Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated

Includes

Lecture 5: Oxidation I Thermal Oxidation Mo

4.1 ( 11 )


Lecture Details

Electrical Engineering 143, 001 - Fall 2014
Microfabrication Technology - Clark Tu-cuong Nguyen
All Rights Reserved

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Ratings

5.0


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Comments
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Sam

Sep 12, 2018

Excellent course helped me understand topic that i couldn't while attendinfg my college.

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Dembe

March 29, 2019

Great course. Thank you very much.

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