MEMS and Microsystems

IIT Kharagpur Course , Prof. Santiram Kal

Lecture 1: Introduction

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Course Description :

Introduction, Evoluation of MEMS, Microsensors. MEMS Materials, Microelectronic Technology, Etch Stop Techniques, Fabrication of Micromachined Microstructure, Microstereolithography, MEMS Pressure and Flow Sensor, MEMS Gyro Sensor, MEMS for Space Application, Wafer Bonding, Packaging of MEMS, MEMS for Biomedical Applications (Bio-MEMS).

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