MEMS and Microsystems

IIT Kharagpur Course , Prof. Santiram Kal

228 students enrolled

Overview

Introduction, Evoluation of MEMS, Microsensors. MEMS Materials, Microelectronic Technology, Etch Stop Techniques, Fabrication of Micromachined Microstructure, Microstereolithography, MEMS Pressure and Flow Sensor, MEMS Gyro Sensor, MEMS for Space Application, Wafer Bonding, Packaging of MEMS, MEMS for Biomedical Applications (Bio-MEMS).

Lecture 18: MEMS Pressure and Flow Sensor

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