Fabrication of Silicon VLSI Circuits using the MOS technology

IIT Bombay Course , Prof. A.N. Chandorkar

Lecture 25: Thin Film Deposition

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Lecture Details :

Fabrication of Silicon VLSI Circuits using the MOS technology by Prof. A.N. Chandorkar, Department of Electrical Engineering, IIT Bombay. For more details on NPTEL visit http://nptel.ac.in

Course Description :

Introduction Micro to Nano A Journey into Intergrated Circuit Technology - Crystal Properties and Silico Growth - IC Fab Labs and Fabrication of IC - Diffusion - Solid State Diffusion - Thermal Oxidation of Silicons - Lithography - ION Implantation - ION Implantation & Silicon IC Processing Flow for CMOS Technology - Silicon IC Processing Flow for CMOS Technology - Thin Film Deposition & Etching in VLSI Processing - Etching in VLSI Processing & Back - End Technology

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