VLSI Technology I

IIT Kharagpur Course , Prof. S.Kal

25 students enrolled

Overview

Contents:
Introduction to VLSI - Design and Technology Overview of VLSI - Yield and cost Estimation of VLSI Chips - Defects, Contamination & Clean Room Requirements - Wafer Cleaning Technology - Oxidation of Silicon - Reaction Kinetics of Oxide Growth in Silicon - Oxidation Techniques, Growth Rate & Characterization - Lithography Process - Photoresists - Optical Lithography Techniques - Exposure Tools and Optical Effects in Lithography - Advanced Lithography Techniques (X-ray,Ion-Beam,E-Beam) - Etching - Dry & Plasma Etching - Impurity Diffusion in Semiconductors

Diffusion Theory and Diffusion Systems - Impurities in Silicon and Diffusion Profile - Evaluation of Diffused Layers in Semiconductors -Ion Implantation : Range Theory and Stopping Mechanism - Ion Implantation Theory and Channeling - Ion Implant Machine - High Energy High Dose Implantation - Epitaxy Techniques and Classifications - Vapor Phase and Liquid Phase Epitaxy - VPE Growth Kinetics and MBE - Defects in Epitaxy Growth, Selective Epitaxy - Chemical Vapor Deposition (CVD): APCVD, LPCVD - CVD Techniques: PECVD, RTCVD, UHVCVD - Metal CVD and MOCVD

Materials for Contacts and Interconnects in VLSI - Metallization Techniques - I : Physical Evaporation - Metallization Techniques - II : Sputtering - Metallization Problems and Failure Mechanisms - Silicides and Copper Metallization - Isolation Technology in VLsI - Advanced Isolation Technology in VLSI - Bipolar VLSI Process Technology - MOS VLSI Process Technology - Advanced VLSI MOS/CMOS Process - CMOS/BiCMOS Process Technology - VLSI Assembly & Packaging : Chip and Wire Bonding - VLSI Packaging Technology

Lecture 1: Skal 1 - Introduction to VLSI Technology

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        Lecture Details

        Video lecture series from IIT Professors (Not Available in NPTEL) VLSI Technology by Prof.Santiram Kal, IIT KGP for more video lectures .... www.satishkashyap.com for free ebooks ..... www.ebook29.blogspot.com 1. Introduction to VLSI Technology 2. Design and Technology Overview of VLSI - I 3. Design and Technology Overview of VLSI - II 4. Yield and cost Estimation of VLSI Chips 5. Defects, Contamination & Clean Room Requirements 6. Wafer Cleaning Technology 7. Oxidation of Silicon 8. Reaction Kinetics of Oxide Growth in Silicon 9. Oxidation Techniques, Growth Rate & Characterization 10. Lithography Process 11. Photoresists 12. Optical Lithography Techniques 13. Exposure Tools and Optical Effects in Lithography 14. Advanced Lithography Techniques (X-ray,Ion-Beam,E-Beam) 15. Etching 16. 17. Dry & Plasma Etching 18. 19. Impurity Diffusion in Semiconductors 20. Diffusion Theory and Diffusion Systems 21. Impurities in Silicon and Diffusion Profile 22. Evaluation of Diffused Layers in Semiconductors 23. Ion Implantation Range Theory and Stopping Mechanism 24. Ion Implantation Theory and Channeling 25. Ion Implant Machine 26. High Energy High Dose Implantation 27. Epitaxy Techniques and Classifications 28. Vapor Phase and Liquid Phase Epitaxy 29. VPE Growth Kinetics and MBE 30. Defects in Epitaxy Growth, Selective Epitaxy 31. Chemical Vapor Deposition (CVD) APCVD, LPCVD 32. CVD Techniques PECVD, RTCVD, UHVCVD 33. Metal CVD and MOCVD 34. Materials for Contacts and Interconnects in VLSI 35. Metallization Techniques - I Physical Evaporation 36. Metallization Techniques - II Sputtering 37. Metallization Problems and Failure Mechanisms 38. Silicides and Copper Metallization 39. Isolation Technology in VLsI 40. Advanced Isolation Technology in VLSI 41. Bipolar VLSI Process Technology 42. 43. MOS VLSI Process Technology 44. Advanced VLSI MOSCMOS Process 45. CMOSBiCMOS Process Technology 46. VLSI Assembly & Packaging Chip and Wire Bonding 47. VLSI Packaging Technology


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